JPS61136963A - 窒化ケイ素基焼結体の製造方法 - Google Patents
窒化ケイ素基焼結体の製造方法Info
- Publication number
- JPS61136963A JPS61136963A JP59256835A JP25683584A JPS61136963A JP S61136963 A JPS61136963 A JP S61136963A JP 59256835 A JP59256835 A JP 59256835A JP 25683584 A JP25683584 A JP 25683584A JP S61136963 A JPS61136963 A JP S61136963A
- Authority
- JP
- Japan
- Prior art keywords
- silicon nitride
- sintered body
- sintering
- periodic table
- group
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910052581 Si3N4 Inorganic materials 0.000 title claims description 38
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 title claims description 37
- 238000004519 manufacturing process Methods 0.000 title claims description 17
- 238000005245 sintering Methods 0.000 claims description 28
- 230000000737 periodic effect Effects 0.000 claims description 14
- 229910052751 metal Inorganic materials 0.000 claims description 10
- 239000002184 metal Substances 0.000 claims description 10
- 150000004678 hydrides Chemical class 0.000 claims description 9
- 150000004767 nitrides Chemical class 0.000 claims description 9
- 239000006104 solid solution Substances 0.000 claims description 9
- 239000012298 atmosphere Substances 0.000 claims description 5
- 239000000203 mixture Substances 0.000 claims description 5
- 230000001590 oxidative effect Effects 0.000 claims description 5
- 239000011812 mixed powder Substances 0.000 claims description 4
- 238000000034 method Methods 0.000 description 20
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 19
- 229910052799 carbon Inorganic materials 0.000 description 13
- 150000001875 compounds Chemical class 0.000 description 10
- 239000000843 powder Substances 0.000 description 8
- 239000013078 crystal Substances 0.000 description 7
- 239000007789 gas Substances 0.000 description 7
- 229910002804 graphite Inorganic materials 0.000 description 7
- 239000010439 graphite Substances 0.000 description 7
- 150000001247 metal acetylides Chemical class 0.000 description 7
- 238000005520 cutting process Methods 0.000 description 6
- 239000012535 impurity Substances 0.000 description 6
- 238000002156 mixing Methods 0.000 description 6
- 239000007858 starting material Substances 0.000 description 6
- 230000000694 effects Effects 0.000 description 4
- 238000000465 moulding Methods 0.000 description 4
- 239000012071 phase Substances 0.000 description 4
- 229910010271 silicon carbide Inorganic materials 0.000 description 4
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 3
- 239000011888 foil Substances 0.000 description 3
- 238000001513 hot isostatic pressing Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical compound CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- -1 ferrous metals Chemical class 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000007731 hot pressing Methods 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 238000010298 pulverizing process Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000007569 slipcasting Methods 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- 229910052582 BN Inorganic materials 0.000 description 1
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 1
- 229910001018 Cast iron Inorganic materials 0.000 description 1
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- CWYNVVGOOAEACU-UHFFFAOYSA-N Fe2+ Chemical compound [Fe+2] CWYNVVGOOAEACU-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
- 229910052790 beryllium Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
- 239000003575 carbonaceous material Substances 0.000 description 1
- 150000004649 carbonic acid derivatives Chemical class 0.000 description 1
- 238000003763 carbonization Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000000280 densification Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 229910052735 hafnium Inorganic materials 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 229910052747 lanthanoid Inorganic materials 0.000 description 1
- 150000002602 lanthanoids Chemical class 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 229910052755 nonmetal Inorganic materials 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000001272 pressureless sintering Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 229910052706 scandium Inorganic materials 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000005728 strengthening Methods 0.000 description 1
- 229910052712 strontium Inorganic materials 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 229910052727 yttrium Inorganic materials 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Landscapes
- Ceramic Products (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59256835A JPS61136963A (ja) | 1984-12-05 | 1984-12-05 | 窒化ケイ素基焼結体の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59256835A JPS61136963A (ja) | 1984-12-05 | 1984-12-05 | 窒化ケイ素基焼結体の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61136963A true JPS61136963A (ja) | 1986-06-24 |
| JPH0463030B2 JPH0463030B2 (en]) | 1992-10-08 |
Family
ID=17298084
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59256835A Granted JPS61136963A (ja) | 1984-12-05 | 1984-12-05 | 窒化ケイ素基焼結体の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61136963A (en]) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6359261B1 (en) | 1999-10-29 | 2002-03-19 | Ngk Spark Plug Co., Ltd. | Silicon nitride sintered body, process for producing the same, ceramic heater employing the silicon nitride sintered body and glow plug containing the ceramic heater |
| JP2003300780A (ja) * | 2002-04-04 | 2003-10-21 | Toshiba Corp | 窒化けい素製耐摩耗性部材およびその製造方法 |
| JP2010090029A (ja) * | 2010-01-12 | 2010-04-22 | Toshiba Corp | 窒化けい素製耐摩耗性部材の製造方法 |
| JP2022154248A (ja) * | 2021-03-30 | 2022-10-13 | デンカ株式会社 | セラミックス焼結体及びその製造方法、並びに窒化ケイ素粉末 |
-
1984
- 1984-12-05 JP JP59256835A patent/JPS61136963A/ja active Granted
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6359261B1 (en) | 1999-10-29 | 2002-03-19 | Ngk Spark Plug Co., Ltd. | Silicon nitride sintered body, process for producing the same, ceramic heater employing the silicon nitride sintered body and glow plug containing the ceramic heater |
| JP2003300780A (ja) * | 2002-04-04 | 2003-10-21 | Toshiba Corp | 窒化けい素製耐摩耗性部材およびその製造方法 |
| JP2010090029A (ja) * | 2010-01-12 | 2010-04-22 | Toshiba Corp | 窒化けい素製耐摩耗性部材の製造方法 |
| JP2022154248A (ja) * | 2021-03-30 | 2022-10-13 | デンカ株式会社 | セラミックス焼結体及びその製造方法、並びに窒化ケイ素粉末 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0463030B2 (en]) | 1992-10-08 |
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